Browsing School of Engineering and Materials Science by Author "Pachkawade, V"
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MEMS sensor for detection and measurement of ultra-fine particles
Pachkawade, V; Tse, Z (IOP Publishing, 2022-06-07)This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. The fine and ultra-fine particles such as particulate matter (PM), ...