Accurate determination of terahertz optical constants by vector network analyzer of Fabry-Perot response.
5438 - 5441
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We present a method based on a Fabry-Perot model to efficiently and accurately estimate optical constants of wafer samples in transmission-only measurements performed by a vector network analyzer (VNA). The method is demonstrated on two separate wafer samples: one of silicon and the other of polymethylmethacrylate. Results show that the method can not only acquire optical constants accurately and simply over a broad frequency domain but also overcome the limitations of calculation for dispersive and lossy materials to which existing methods are susceptible, such as those based on VNA-driven quasi-optical transmissometers and terahertz time-domain spectrometry.
AuthorsSun, W; Yang, B; Wang, X; Zhang, Y; Donnan, R
- College Publications